采用RF磁控溅射法在石英玻璃上制备了InGaZnO薄膜, 并对薄膜进行了真空退火实验, 探讨了沉积过程中氧气流量及真空退火温度对薄膜......

Giant dielectric constant materials have great potential in application of miniaturization of electronic devices and hig......